Udindo Woyenera Wopukutira wa Brown Fused Alumina Micropowder mu Makampani Opanga Ma Semiconductor
Anzanga, lero tikambirana za chinthu chovuta komanso chosavuta kumva—ufa wa alumina wofiirira wosakanikiranaMwina simunamvepo za izi, koma ma chips ofunikira kwambiri komanso osavuta kugwiritsa ntchito pafoni yanu ndi pa watchwatch yanu, asanapangidwe, mwina anali atathana nawo. Kutcha chip kuti "wokongoletsa wamkulu" si kukokomeza.
Musaganize kuti ndi chida chovuta ngati chodulira. Mu dziko la akatswiri opanga zinthu zoyezera mpweya, chimagwira ntchito yofewa ngati chosema chaching'ono pogwiritsa ntchito ziboliboli zazing'ono.
I. "Kujambula Nkhope" kwa Chip: Nchifukwa Chiyani Kupera N'kofunika?
Choyamba tiyeni timvetse chinthu chimodzi: tchipisi sizimakula mwachindunji panthaka yathyathyathya. "Zimamangidwa" mzere ndi mzere pa wafer wa silicon woyera kwambiri, wathyathyathya (womwe timautcha "wafer"), monga kumanga nyumba. "Nyumba" iyi ili ndi zipinda zambirimbiri, ndipo malo ozungulira pansi iliyonse ndi ochepa kuposa makulidwe a tsitsi la munthu ndi chikwi chimodzi.
Vuto ndi ili: mukamanga pansi yatsopano, ngati maziko—pamwamba pa pansi yakale—ali osagwirizana pang'ono, ngakhale ndi kutuluka kochepa ngati atomu, kungayambitse nyumba yonse kukhala yokhotakhota, yofupikitsa magetsi, komanso kupangitsa kuti tchipisi tisagwiritsidwe ntchito. Kutayika si nthabwala.
Chifukwa chake, tikamaliza kuyeretsa pansi pa nyumba iliyonse, tiyenera kuchita "kuyeretsa" ndi "kulinganiza." Njirayi ili ndi dzina lodziwika bwino: "Chemical Mechanical Planarization," chidule chake ndi CMP. Ngakhale dzinalo likumveka lovuta, mfundo yake ndi yosavuta kumvetsetsa: ndi kuphatikiza kwa dzimbiri la mankhwala ndi kuphwanya kwa makina.
"Kubaya" kwa mankhwala kumagwiritsa ntchito madzi apadera opukutira kuti afewetse ndikuwononga zinthu zomwe zikuyenera kuchotsedwa, zomwe zimapangitsa kuti zikhale "zofewa" kwambiri.
"Kumenya" kwamakina kumayamba kugwira ntchito—ufa wa brown corundum micropowderNtchito yake ndi kugwiritsa ntchito njira zakuthupi kuti "zichotse" bwino komanso mofanana zinthu zomwe "zafewa" ndi njira ya mankhwala.
Mungafunse, popeza pali zinthu zambiri zopukutira, chifukwa chiyani izi zili choncho makamaka? Apa ndi pomwe makhalidwe ake apadera amaonekera.
II. "Ufa Wopangidwa ndi Micronized Wosapangidwa ndi Micronized Kwambiri": Luso Lapadera la Alumina Yopangidwa ndi Brown Fused
Mu makampani opanga zinthu zamagetsi, ufa wa alumina wofiirira wosakanikirana ndi micronized womwe umagwiritsidwa ntchito si chinthu wamba. Ndi chipangizo cha "ma special forces", chosankhidwa mosamala komanso chokonzedwa bwino.
Choyamba, n'zovuta mokwanira, koma osati mosasamala.Alumina wofiirira wosakanikiranaKuuma kwa alumina ndi kwachiwiri kuposa diamondi, kokwanira kugwira zinthu zomwe zimagwiritsidwa ntchito kwambiri monga silicon, silicon dioxide, ndi tungsten. Koma chofunika kwambiri ndichakuti kuuma kwake ndi "kolimba". Mosiyana ndi zinthu zina zolimba (monga diamondi) zomwe zimakhala zofooka komanso zosweka mosavuta zikapanikizika, alumina yofiirira yosakanikirana imasunga umphumphu wake pamene ikutsimikizira kuti kudula kuli ndi mphamvu, kupewa kukhala "chinthu chowononga."
Chachiwiri, kukula kwake kwa tinthu tating'onoting'ono kumatsimikizira kudula kofanana. Iyi ndi mfundo yofunika kwambiri. Tangoganizirani kuyesa kupukuta jade yamtengo wapatali ndi mulu wa miyala yosiyanasiyana kukula. Miyala ikuluikulu ingasiye mabowo akuya, pomwe yaying'ono ingakhale yaying'ono kwambiri kuti isagwire ntchito. Mu njira za CMP (Chemical Mechanical Polishing), izi sizovomerezeka konse. Ufa wa alumina wofiirira womwe umagwiritsidwa ntchito mu semiconductors uyenera kukhala ndi kugawa kwa tinthu tating'onoting'ono kwambiri. Izi zikutanthauza kuti tinthu tating'onoting'ono pafupifupi tonse ndi tofanana kukula. Izi zimatsimikizira kuti tinthu tating'onoting'ono ta micropowder timayenda mogwirizana pamwamba pa wafer, ndikuyika mphamvu yofanana kuti apange malo opanda cholakwa, osati otsekedwa. Kulondola kumeneku kuli pamlingo wa nanometer.
Chachitatu, ndi chinthu chogwiritsidwa ntchito ndi mankhwala “oona mtima”. Kupanga ma chip kumagwiritsa ntchito mankhwala osiyanasiyana, kuphatikizapo malo okhala ndi asidi ndi alkaline. Ufa wa alumina wofiirira ndi wokhazikika kwambiri ndipo sugwirizana mosavuta ndi zinthu zina zomwe zili mumadzimadzi opukutira, zomwe zimaletsa kuyika kwa zinyalala zatsopano. Zili ngati wantchito wolimbikira ntchito, wosadzikuza—mtundu wa munthu amene mabwana (mainjiniya) amamukonda.
Chachinayi, mawonekedwe ake ndi osavuta kulamulira, ndikupanga tinthu "tosalala". Ufa wa alumina wofiirira wopangidwa bwino kwambiri ukhoza kulamulira "mawonekedwe" (kapena "mawonekedwe") a tinthu tating'onoting'ono. Kudzera mu njira yapadera, tinthu tating'onoting'ono tomwe tili ndi m'mbali zakuthwa tingasandulike kukhala mawonekedwe ofanana ndi ozungulira kapena a polyhedral. Tinthu "tosalala" timeneti timachepetsa bwino "kuzungulira" pamwamba pa wafer panthawi yodula, zomwe zimachepetsa kwambiri chiopsezo cha kukwawa.
III. Kugwiritsa Ntchito Padziko Lonse: "Mpikisano Wosalankhula" pa Mzere Wopanga wa CMP
Pa mzere wopanga wa CMP, ma wafer amagwiridwa mwamphamvu ndi ma vacuum chucks, pamwamba pake pansi, ndikukanikizidwa pa pad yozungulira yopukutira. Madzi opukutira okhala ndi ufa wa alumina wofiirira amapopedwa nthawi zonse, ngati nthunzi, pakati pa pad yopukutira ndi wafer.
Pa nthawiyi, “mpikisano wolondola” m’dziko la microscopic umayamba. Tinthu tambirimbiri ta alumina tosakanikirana ndi bulauni, tomwe timaphwanyidwa ndi kuzungulira, timadula miyandamiyanda ya nanometer pa sekondi iliyonse pamwamba pa wafer. Tiziyenera kuyenda mogwirizana, ngati gulu lankhondo lodzisunga, kupita patsogolo bwino, “kuchepetsa” madera okwera ndi “kusiya opanda kanthu” madera otsika.
Njira yonse iyenera kukhala yofatsa ngati mphepo ya masika, osati mphepo yamkuntho. Mphamvu yochulukirapo imatha kukanda kapena kupanga mikwingwirima (yotchedwa "kuwonongeka kwa pansi pa nthaka"); mphamvu yosakwanira imabweretsa magwiridwe antchito ochepa ndikusokoneza nthawi yopangira. Chifukwa chake, kuwongolera molondola kuchuluka kwa zinthu, kukula kwa tinthu tating'onoting'ono, ndi mawonekedwe a ufa wa alumina wofiirira wosakanikirana kumatsimikizira mwachindunji kuchuluka kwa chip ndi magwiridwe antchito.
Kuyambira pakupukuta koyambirira kwa ma silicon wafers, mpaka pakukonza gawo lililonse loteteza (silicon dioxide), ndipo pamapeto pake mpaka pakupukuta ma tungsten plugs ndi mawaya amkuwa omwe amagwiritsidwa ntchito polumikiza ma circuits, ufa wa alumina wofiirira ndi wofunikira kwambiri pafupifupi gawo lililonse lofunikira la kupanga ma planar. Umakhudza kwambiri njira yonse yopangira ma chip, "ngwazi yobisika."
IV. Mavuto ndi Tsogolo: Palibe chabwino, chabwino chokha
Zachidziwikire, njira iyi ilibe mapeto. Pamene njira zopangira ma chip zikupita patsogolo kuchoka pa 7nm ndi 5nm kufika pa 3nm komanso kukula kochepa, zofunikira pa njira za CMP zafika pamlingo "wapamwamba". Izi zimabweretsa zovuta zazikulu pa ufa wa alumina wofiirira wosakanikirana:
Zabwino komanso zofanana:Ufa wa mtsogoloingafunike kufika pa sikelo ya nanometer makumi ambiri, ndi kugawa kwa tinthu tofanana ngati kuti yasefedwa ndi laser.
Chotsukira: Zonyansa zilizonse za ayoni zachitsulo zimapha, zomwe zimapangitsa kuti pakhale kufunikira kwakukulu kwa kuyera.
Kugwira Ntchito: Kodi "ma micropowders anzeru" adzawonekera mtsogolo? Mwachitsanzo, ndi malo osinthidwa mwapadera, amatha kusintha mawonekedwe odulira pansi pa mikhalidwe inayake, kapena kudzipangitsa kudzinola, kudzipaka mafuta, kapena ntchito zina?
Chifukwa chake, ngakhale kuti idayamba mumakampani odziwika bwino ophera tizilombo toyambitsa matenda, ufa wa alumina wopangidwa ndi brown fused wasintha kwambiri ukalowa m'gulu la opanga ma semiconductors. Silinso "nyundo," koma "scalpel yopangira opaleshoni." Malo osalala bwino a chip chapakati pa chipangizo chilichonse chamagetsi chomwe timagwiritsa ntchito amachokera ku tinthu tating'onoting'ono tosawerengeka.
Iyi ndi pulojekiti yayikulu yomwe ikuchitika padziko lapansi la microscopic, ndipoufa wa alumina wofiirira wosakanikiranaMosakayikira ndi katswiri waluso kwambiri koma wosafunikira kwenikweni pa ntchitoyi.